There is no direct template for subcategories/subterms.
both will be accessible in taxonomy.php
I didn’t get what’s your requirement to have a separate page for subcategories/subterms.
but you can handle this on taxonomy.php
if( subcat ){
// show sub category view
}elseif(parent) {
// show parent category view
}
or check this answer more related to your request
Different template for subcategories
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